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SMT Thermal MEMS Differential Pressure Sensors - MDP2000/MDP3000

? Measurement Range: ±500Pa
? Zero-point Accuracy: ±0.5Pa
? Span Accuracy: ± 3.0% m.v
? Linearity (Least Square): 0.5%F.S
? Operating Temperature: -20 to +80oC

Model Number: MDP2000/MDP3000
Data Sheet:

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Product Specification

MDP2000/MDP3000?Differential Pressure Sensors General Description
MEMSIC's MDP2000 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on MEMSIC's highly successful proprietary CMOS thermal accelerometers already sold in millions. MDP2000 series offers a wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis.

MEMSIC's thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of providing SPI output of 15 bit digital raw counts. The polynomial fitting calibration coefficients are provided by QR code label for easy scanning to convert output to differential pressure.

MDP2000/MDP3000?Differential Pressure Sensors?Features
? Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.
? Pressure based on thermal micro-flow measurement
? Outstanding hysteresis and repeatability
? Linearized and temperature compensated
? SPI with 16bit resolution
? Cost Effective
? RoHS and REACH compliant
? SMT Package

MDP2000/MDP3000?Differential Pressure Sensors?Applications
? Medical CPAP and Ventilator
? HAVC and building control solution
? Burner Control
? Filter Monitoring
? Process Control and Automation

MDP2000/MDP3000?Differential Pressure Sensors?Performance

Parameter	Value	Unit
Measurement Range	±500	Pa
Zero-point Accuracy	±0.5	Pa
Span Accuracy	± 3.0	% m.v
Linearity (Least Square)	0.5	%F.S
Gas Flow Through Sensor	100	ml/min
Zero-point Repeatability?and Hysteresis	0.2	Pa
Response Time/ Communication Update Rate	8	ms
Span Repeatability and?Hysteresis	0.5	% m.v.
Over Pressure	5	Bar
Temperature Compensation Coefficient	TBD
Span Shift due to Temperature Variation	± 0.05	%m.v. per oC
Offset Shift due to Temperature Variation	< Noise
Offset Stability	<0.1	Pa/year

MDP2000/MDP3000?Differential Pressure Sensors?Environment

Parameter	Value	Unit
Operating Temperature	-20 to +80	oC
Storage Temperature	-40 to +125	oC
Relative Humidity (Non-Condensing)	To 95	%
Radiated Susceptibility	10	V/m
ESD	4/(8)	kV
Shock	50G @ 5 ms	G_Peak
Vibration (5-2000 Hz)	20	G_rms
Media Compatibility	N2, O2, Air
Orientation Sensitivity	TBD	Pa
Protection	IEC IP30

MDP2000/MDP3000?Differential Pressure Sensors?Electrical

Parameter	Description	Min	Typ	Max	Unit
Flow Output (SPI)	Positive Pressure	32768		65535	counts
Flow Output (SPI)	Negative Pressure	32768		0	counts
Temperature Output	SPI		10		bits
Temperature Resolution			0.3		oC/LSB
A/D Sample Rate				150	Hz
SPI Clock Frequency			2		MHz
Supply Voltage		2.7	3.3		Vdc
Operating Current	Zero Flow		2.4		mA
Operating Current	Max Flow Measurement		4.2		mA
Sleep Current?			0.1		uA
Wake UpTime	@ 25 KHz Clock Frequency	100			ms