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MEMS Differential Pressure Sensors - MDP200 Series

? Range: +/-500 Pa
? Accuracy: +/-3% m.v.
? Output: I2C
? > 0.25% Linearity
? Operating Temperature: -20 to +80??oC?
? Protection??: IEC IP30?

Model Number: MDP200 Series
Data Sheet:

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Product Specification

MDP200 Series?MEMS Differential Pressure Sensors?General Description
MEMSIC's MDP200 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on MEMSIC's highly successful proprietary CMOS thermal accelerometers already sold in millions. MEMSIC's thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital format. The signal is linearized and temperature compensated.?

MDP200 series offers a wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis. The MDP200 is also available as a low cost flow detector with an analog output and it can easily be configured to suit a variety of applications from burner control, HVAC, medical flow to industrial processing control.?

MDP200 Series?MEMS Differential Pressure Sensors?Features
? Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.
? Pressure based on thermal micro-flow measurement
? Outstanding hysteresis and repeatability
? Linearized and temperature compensated
? Digital I2C with 16bit resolution
? Cost Effective
? RoHS and REACH compliant
? Digital I2C Output
? Detects pressure difference as low as 0.02 Pascal

MDP200 Series?MEMS Differential Pressure Sensors?Applications
? Medical CPAP and Ventilator
? HAVC and building control solution
? Burner Control
? Filter Monitoring
? Process Control and Automation

MDP200 Series?MEMS Differential Pressure Sensors?Performance?

Parameter	-500 Pa	Unit
Measurement Range	±500	Pa
Zero-point Accuracy	Below Resolution (0.016 Pa)	Pa
Span Accuracy	± 3.0	% m.v
Total Error (0oC - 50oC)	±3.5	% m.v
Zero-point Repeatability and?Hysteresis	±0.05	Pa
Resolution (Near Zero)/ Lowest Detectible Pressure	0.016	Pa
Response Time/ Communication Update Rate	8	ms
Span Repeatability and Hysteresis	0.5	% m.v.
Over Pressure	1.5	Bar
Span Shift due to Temperature Variation	0.05	%m.v. per oC
Offset Shift due to Temperature Variation	<0.03	Pa
Offset Stability		Pa/year
Non-Linearity(BFSL)	0.3% (0-100 Pa) 0.4% (0-200 Pa) 0.8%(0-500 Pa)	% Full Scale
Orientation Sensitivity	< resolution - port @ 90o vs 270o <0.05 Pa - port @ 180o vs 90o	Pa
Gas Flow Through Sensor	100	ml/min

MDP200 Series?MEMS Differential Pressure Sensors?Environment

Parameter	-500 Pa	Unit
Operating Temperature	-20 to +80	oC
Storage Temperature	-40 to +85	oC
Relative Humidity (Non- Condensing)	To 95	%
Radiated Susceptibility	5	V/m
ESD	4/(8)	kV
Shock	50G @ 5ms	G_Peak
Vibration (5-2000 Hz)	20	G_rms
Media Compatibility	N2, O2, Air
Orientation Sensitivity	TBD	Pa
Protection	IEC IP30
Barb Strength	4	lbf (3 orthogonal directions)

MDP200 Series?MEMS Differential Pressure Sensors?Electrical

Parameter	-500 Pa	Unit
Input Voltage Range	3.0-3.6	Vdc
Supply Current	7	mA
Interface	I2C
Resolution	16 (bi-direction)	Bit
Bus Clock Frequency	< 400	KHz
I2C Default Address	0x31