Digital Gas Flow Sensor - MFM2070U
? Flow Range: 0.07 ~ 70 SLM
? Operating Temperature Range: -40 ~ 85°C
? Accuracy: +/-2.5% Reading
? Resolution?: 15bit
? Sampling Time: 7.5ms
? Low Power Consumption
? Digital I2C
- Model Number: MFM2070U
- Data Sheet:
- Quantity:
- - +
Product Specification
MFM2070U Digital Gas Flow Sensor DESCRIPTION
MFM2000 series is a gas flow sensor with low pressure drop capable of measuring medical gases up to 70 lpm. It is configured to be customizable with different flow inlet and outlet configurations.
MFM2070U Digital Gas Flow Sensor FEATURES
? Low Pressure Drop Flow Sensor
? High Accuracy +/-2.5% Reading
? Calibrated and Temperature Compensated for Air
? Low Power Consumption
? Digital I2C
? Made for Medical Applications
? Calibrated for Air, and O2
MFM2070U Digital Gas Flow Sensor FLOW PERFORMANCE
Measurements performed with air at 23°C, 1 Atm, 50% RH, at 3.3V DC power supply, unless otherwise specified. Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.
|
Parameter |
Condition |
Min |
Typical |
Max |
Unit |
|
Flow Range |
Calibration gas: Air |
0.07 |
|
70 |
SLM |
|
Calibrated Temperature Range |
|
0 |
|
50 |
°C |
|
Operating Temperature Range |
|
-40 |
10 | 85 |
°C |
|
Storage Temperature Range |
|
-40 |
|
105 |
°C |
|
Accuracy |
25oC |
|
+/-2.5 |
|
% Reading |
|
Temperature Error |
0-50oC |
|
|
0.1 |
reading/°C |
|
Resolution |
I2C |
|
15 |
|
bit |
|
Sampling Time |
|
|
7.5 |
|
ms |
|
Power Consumption |
@ Recommended Heater
Power at zero Flow
|
|
|
7.0 |
mA |
|
PD |
|
|
650 |
uA |
|
|
Pressure Drop |
Max flow without mesh |
|
|
120 |
Pa |
|
Max flow(with mesh screen) |
|
|
400 |
Pa |
|
|
Operating Pressure Range |
Absolute |
0.7 |
|
1.3 |
Bar |
|
Operating Overpressure |
Absolute |
|
+/-0.2 |
|
Bar |
|
Averaging |
10 frames running window averaging |
||||
|
Wetted Materials |
PES (Medical grade: biocompatible; ISO 10993 or USP Class VI), FR4, Silicon
Nitrite, Silicon, Epoxy, Gold.
|
||||
|
Standards |
RoHS, REACH, ISO15001, ISO10993-1, ISO10993-5,UL94 V0, IEC |
||||
ELECTRICAL SPECIFICATIONS (VDD=3.3V, TA=25C, UNLESS OTHERWISE NOTED)
|
Parameter |
Condition |
Min |
Typical |
Max |
Unit |
|
Supply DC Voltage |
DC |
2.7 | 3.3 | 5.5 | V |
|
Power Consumption |
@ Recommended Heater Power at
zero Flo |
|
|
7.0 |
mA |
|
PD |
|
|
650 |
uA |
|
|
Data format Scaling Factor |
User read count value from register 0,
then multiply by 2.5 to get actual flow rate in sccm |
2.5 |
sccm | ||
MFM2070U Digital Gas Flow Sensor MECHANICAL SPECIFICATIONS
|
Specification |
Condition |
Min |
Typical |
Max |
Unit |
|
Burst Pressure |
Over ambient |
1 |
|
|
Bar |
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