Miniature SMD Pressure Sensors - MS54xx
? 1, 7, 12, and 70 bar absolute pressure range
? Uncompensated
? Piezoresistive silicon micromachined sensor
? Miniature surface mount
? Ceramic carrier
? Low noise, high sensitivity, high linearity
? Small size
? High reliability, low drift
? -40 °C to +125 °C operation range
- Model Number: MS54xx
- Data Sheet:
- Quantity:
- - +
Product Specification
MS54xx Miniature SMD Pressure Sensors Description:
The MS54xx SMD pressure sensor series is designed for pressure sensor systems with highest demands on resolution and accuracy. The device consists of a silicon micromachined pressure sensor die mounted on a 6.2 x 6.4 mm ceramic carrier or a 6.1 x 6.3 mm PCB protected by a metal or plastic cap. The MS54xx can be delivered in a high sensitivity version giving a maximal output voltage or in a high linearity version. Both versions provide an output voltage directly proportional to the applied pressure.
|
Carrier |
Full scale pressure |
High Sensitivity Versions |
High Linearity Versions |
||||
|
Product code |
Full scale span |
Linearity |
Product code |
Full scale span |
Linearity |
||
|
Ceramic |
1 bar |
MS5401-AM |
240 mV |
±0.20 % FS |
MS5401-BM |
150 mV |
±0.05 % FS |
|
7 bar |
MS5407-AM |
392 mV |
±0.20 % FS |
|
|||
|
12 bar |
|
MS5412-BM |
150 mV |
±0.05 % FS |
|||
|
70 bar |
MS5470-AM |
310 mV |
±0.25 % FS |
|
|||
MS54xx Miniature SMD Pressure Sensors Features:
? 1, 7, 12, and 70 bar absolute pressure range
? Uncompensated
? Piezoresistive silicon micromachined sensor
? Miniature surface mount
? Ceramic carrier
? Low noise, high sensitivity, high linearity
? Low cost SMD package
? Small size
? High reliability, low drift
? -40 °C to +125 °C operation range
? Gel protection against humidity and water
MS54xx Miniature SMD Pressure Sensors Applications:
? Brake systems
? High resolution altimeters, variometer
? Barometers
? Engine management
? Waterproof watches and diving computers
MS54xx Miniature SMD Pressure Sensors Electrical Characteristics
HIGH SENSITIVITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)
|
|
Parameter |
Min |
Typ |
Max |
Unit |
|
MS5401-AM |
Operating pressure range |
0 | - | 1 |
bar |
|
Full-scale span (FS) |
190 | 240 | 290 |
mV |
|
|
Sensitivity |
190 | 240 | 290 |
mV/bar |
|
|
Linearity |
- |
±0.15 |
±0.40 |
% FS |
|
|
MS5407-AM |
Operating pressure range |
0 | - | 7 |
bar |
|
Full-scale span (FS) |
322 | 392 | 462 |
mV |
|
|
Sensitivity |
46 | 56 | 66 |
mV/bar |
|
|
Linearity |
|
±0.15 |
±040 |
% FS |
|
|
MS5470-AM |
Operating pressure range |
0 | - | 70 |
bar |
|
Full-scale span (FS) |
250 | 310 | 370 |
mV |
|
|
Sensitivity |
3.6 | 4.4 | 5.3 |
mV/bar |
|
|
Linearity |
|
±0.25 |
±0.50 |
% FS |
|
|
All Ranges |
Operating temperature range |
-40 | - | 125 |
°C |
|
Zero pressure offset |
-40 | 0 | 40 |
mV |
|
|
Pressure hysteresis |
- | - |
±0.20 |
% FS |
|
|
Temperature hysteresis |
- | 0.3 | 0.8 |
% FS |
|
|
Repeatability |
- | - |
±0.20 |
% FS |
|
|
Bridge resistance |
3.0 | 3.4 | 3.8 |
kΩ |
|
|
Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset |
+2'400 -1'500 -80 |
2'900 -1'900 - |
+3'300 -2'300 +80 |
ppm/°C ppm/°C μV/°C |
HIGH LINEARITY VERSIONS
(Vs+ = 5 V; Ta = 25 °C)
|
|
Parameter |
Min |
Typ |
Max |
Unit |
|
MS5401-BM |
Operating pressure range |
0 | - | 1 |
bar |
|
Full-scale span (FS) |
120 | 150 | 180 |
mV |
|
|
Sensitivity |
120 | 150 | 180 |
mV/bar |
|
|
Linearity |
- |
±0.05 |
±0.20 |
% FS |
|
|
MS5412-BM |
Operating pressure range |
0 | - | 12 |
bar |
|
Full-scale span (FS) |
120 | 150 | 180 |
mV |
|
|
Sensitivity |
10 | 12.5 | 15 |
mV/bar |
|
|
Linearity |
|
±0.05 |
±0.15 |
% FS |
|
|
All Ranges |
Operating temperature range |
-40 | - | 125 |
°C |
|
Zero pressure offset |
-40 | 0 | 40 |
mV |
|
|
Pressure hysteresis |
- | - |
±0.20 |
% FS |
|
|
Temperature hysteresis |
- | 0.3 | 0.8 |
% FS |
|
|
Repeatability |
- | - |
±0.20 |
% FS |
|
|
Bridge resistance |
3.0 | 3.4 | 3.8 |
kΩ |
|
|
Temperature coefficient of resistance Temperature coefficient of span Temperature coefficient of offset |
+2'400 -1'500 -80 |
2'900 -1'900 - |
+3'300 -2'300 +80 |
ppm/°C ppm/°C μV/°C |
MS54xx Miniature SMD Pressure Sensors Ordering Information
|
Product code |
Product |
Art. No |
Package |
Delivery Form |
|
MS5401-AM |
Miniature pressure sensor 1 bar, High sensitivity |
325401001-00 |
Ceramic carrier |
Tube |
|
325401001-50 |
Ceramic carrier |
Tape and Reel |
||
|
325401006-00 |
Ceramic carrier, without transparent gel |
Tube |
||
|
MS5401-BM |
Pressure sensor 1 bar, High linearity |
325401000-00 |
Ceramic carrier |
Tube |
|
325401000-50 |
Ceramic carrier |
Tape and Reel |
||
|
325401002-00 |
Ceramic carrier, without transparent gel |
Tube |
||
|
MS5407-AM |
Miniature pressure sensor 7 bar, High sensitivity |
325407000-00 |
Ceramic carrier |
Tube |
|
325407000-50 |
Ceramic carrier |
Tape and Reel |
||
|
325407001-00 |
Ceramic carrier, without transparent gel |
Tube |
||
|
MS5412-BM |
Pressure sensor 12 bar, High linearity |
325412000-00 |
Ceramic carrier |
Tube |
|
325412000-50 |
Ceramic carrier |
Tape and Reel |
||
|
MS5470-AM |
Miniature pressure sensor 70 bar, High sensitivity |
325470000-00 |
Ceramic carrier |
Tube |
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