Product Specification

Description of MEMS flow sensing chip MF3000 series for gas mass flowmeter:


The MF3000 series gas mass flowmeter adopts a bypass design and uses the company's proprietary MEMS flow sensing chip, integrating time-domain flow sensing technology and intelligent electronic technology. Compared with the traditional calorimetric flow sensing technology in the market, this unique time-domain flow sensing technology eliminates the sensitivity of some common gases. For some other sensitive gases, gas identification can be achieved in combination with software. The surface of MEMS chips is passivated with silicon nitride ceramic materials and combined with waterproof and oil-proof nano-coatings, significantly enhancing the product's performance and reliability. Time-domain flow sensing technology also offers better linearity and significantly reduces the temperature effect.


The MF3000 series gas mass flowmeter can directly measure the mass flow of gas and is suitable for all kinds of clean and dry gases. The measurement range of MF3000 covers from (O~2) SLPM to (O~1500) SLPM, and the maximum working pressure has been increased to 0.8MPa. The MF3000 offers multiple signal outputs. Remote data acquisition and setting can be achieved through RS485 or IC digital communication interfaces, and NPN or PNP switch signal output can be selected. The MF3000 is equipped with both LED digital display and button functions, allowing users to adjust or query the parameters of the flowmeter on site.



Product features of MEMS flow sensing chip MF3000 series for gas mass flowmeter:

Mass flow rate, time-domain sensing technology
Full range coverage from (0~2) SLPM to (0~1500) SLPM
High accuracy throughout the full range and excellent repeatability
It can measure various gases without the need for special correction
Multiple output signals are available for selection

Supports multiple connection methods and is easy to install and use